扫描电镜原理及应用

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块状样品体积要控制在 120 mm ×80 mm × 50 mm 以内、高度限制在 5 ～ 10 mm 左 右。"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\t4) 测试的整个流程要注意清洁。为降低样品污染程度，可事先用酒精或超声波清洗。"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\t5) 观察成分相的样品表面应尽量光滑，高度差异不可太大，必要时需精细抛光。"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\t6) 待测面为锥状、似锥状或有明显棱角、尖角等的突兀状样品无法测试。同样，样品底面因不平整而阻碍导电处理的样品需要磨平。"},{"attributes":{"align":"justify"},"insert":"\n\n\n"},{"insert":"制样方法"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"insert":"\t"},{"attributes":{"bold":true},"insert":"1）制样"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"insert":"\t"},{"attributes":{"bold":true},"insert":"2）镀膜"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\t真空蒸发法：C"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\t离子溅射法：Al、Cr、Au、Pt或其合金"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\t\t"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"insert":"[1]陈莉,徐军,陈晶.扫描电子显微镜显微分析技术在地球科学中的应用[J] .中国科学：地球科学, 2015, 45 (9) :1347-1358"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"[2]徐海军,金淑燕,郑伯让.岩石组构学研究的最新技术--电子背散射衍射 (EBSD)[J] .现代地质, 2007, 21 (2) :411-420"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"[3]韩伟,肖思群.聚焦离子束（FIB）及其应用[J] .中国材料进展, 2013, 32 (12) :716-727"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"[4]甘玉雪，杨锋，吴杰，等.扫描电镜在岩矿分析中的应用[J]. 电子显微学报，2019，38（3）：284-293"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#9a9a9a"},"insert":"来源于米格实验室，作者米格实验室"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"var(--weui-FG-0)"},"insert":"半导体工程师"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"半导体经验分享，半导体成果交流，半导体信息发布。半导体行业动态，半导体从业者职业规划，芯片工程师成长历程。"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"\n"}]