FIB-SEM双束电镜加能谱EDS

失效分析赵工半导体工程师 2023-03-10 09:34 发表于北京 FIB-SEM双束电镜仪器信息厂家：美国thermo scientific（FEI）型号：Scios 2 技术参数 1.电子束电流范围：1pA-400nA 2.电子...

[{"attributes":{"color":"var(--weui-FG-2)"},"insert":"失效分析赵工"},{"insert":" "},{"attributes":{"color":"#576b95"},"insert":"半导体工程师"},{"insert":" "},{"attributes":{"color":"var(--weui-FG-2)"},"insert":"2023-03-10 09:34"},{"insert":" "},{"attributes":{"color":"var(--weui-FG-2)"},"insert":"发表于北京"},{"insert":"\n\n"},{"attributes":{"bold":true},"insert":"FIB-SEM双束电镜仪器信息"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"厂家："},{"insert":"美国thermo scientific（FEI）"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"型号："},{"insert":"Scios 2"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"insert":{"image":"https://files.eteforum.com/202303/1efe4f081927d00e.jpg"}},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"技术参数"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"1."},{"insert":"电子束电流范围：1pA-400nA"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"2."},{"insert":"电子束电压：200V-30kV，具有减速模式"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"3."},{"insert":"电子束分辨率：0.7nm（30kV）、1.4nm（1kV）"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"4."},{"insert":"大束流Sidewinder离子镜筒"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"5."},{"insert":"离子束加速电压: 500V-30kV"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"6."},{"insert":"离子束分辨率：3.0nm（30KV）"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"7."},{"insert":"离子束束流：1.5pA-65nA，15孔光阑"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"功能特色"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"1."},{"insert":"GIS气体注入：Pt"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"2."},{"insert":"Easylift纳米机械手（精度<500nm）"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"3."},{"insert":"ETDSE-T1(筒内低位)、T（高位）探头"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"4."},{"insert":"Nav-camTM：样品室内光学导航相机"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"5."},{"insert":"Auto TEM4、Autoslice、Map for 3D自动拼图、NanoBuilder纳米加工软件"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"6."},{"insert":"布鲁克XFlash6 EDS"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"能谱信息"},{"attributes":{"align":"justify"},"insert":"\n\n\n\n"},{"attributes":{"bold":true},"insert":"1."},{"insert":"探测器：硅漂移（SDD）电制冷探测器，采用场效应管（FET）一体化集成设计的高速SDD芯片，60mm2有效面积，超薄窗设计，独立真空；"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"2."},{"insert":"能量分辨率：在100,000CPS条件下Mn Ka保证优于129eV，轻元素分辨率：C-K/57eV, F-K/67eV；"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"3."},{"insert":"采用纤细化等技术，探测器探指直径不大于18.2mm，优化固体角，有效提高输入计数率；"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"4."},{"insert":"元素分析范围: Be4～Cf98"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"5."},{"insert":"能谱仪处理单元与计算机采用分立式设计，单探测器输出最大计数率优于600,000CPS，可处理最大计数率优于1,500,000CPS"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"6."},{"insert":"谱定性分析：可自动标识谱峰，可设定自动标定的元素范围，可进行谱重构，对重叠峰进行可视化谱峰剥离，并对重叠峰区域各种可能的元素进行搜索与再确认"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"7."},{"insert":"配备完善而精准的原子数据库，包含所有的分析线系(K, L, M 和 N线系)"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"8."},{"insert":"定量分析：可对抛光表面或粗糙表面定量分析。采用定量修正技术，对倾斜样品进行修正，并增强对轻元素的修正；可以得到归一化和非归一化定量结果，可以用化学配位法得到非归一化结果；用户可编辑创建自有定量方法。"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"attributes":{"bold":true},"insert":"9."},{"insert":"可将电镜图像传输到能谱仪的显示器上，并以该图为中心做微区分析，实现点、区域定性定量分析，以及线扫描和面分布功能。"},{"attributes":{"align":"justify","header":1},"insert":"\n\n"},{"insert":"来源：米格实验室；作者：米格小编 "},{"attributes":{"align":"justify","header":1},"insert":"\n"},{"attributes":{"color":"var(--weui-FG-0)"},"insert":"半导体工程师"},{"attributes":{"align":"justify","header":1},"insert":"\n"},{"insert":"半导体经验分享，半导体成果交流，半导体信息发布。半导体行业动态，半导体从业者职业规划，芯片工程师成长历程。"},{"attributes":{"align":"justify","header":1},"insert":"\n"},{"attributes":{"header":1},"insert":"\n"},{"insert":"\n"}]

发表于 2023-03-10 10:39
阅读 ( 580 )

作家榜 »

胡虹凌 713 文章
半导体工程师 491 文章
君鉴云课堂 102 文章
野生钢铁侠 17 文章
Sam大叔 15 文章
博容小哥哥 14 文章
工程师看海 12 文章
柯安 11 文章