激光探针台应用介绍

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08:04"},{"insert":" "},{"attributes":{"color":"var(--weui-FG-2)"},"insert":"发表于北京"},{"insert":"\n"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"探针台大家不陌生了，是我们半导体实验室电性能测试的常用设备，也是各大实验室的熟客。优点太多了，成本低，用途广，操作方便，对环境要求也不高，即使没有超净间，普通的坏境也可以配置，测试结果稳定，客观。深受工程师们的青睐。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"align":"center"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":{"image":"https://files.eteforum.com/202301/4840165ef92a7e7c.png"}},{"attributes":{"color":"#000000"},"insert":"最近北软实验室探针台再升级，趁机为大家总结一下探针台的用途，若您还有新发现，欢迎留言交流。"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"color":"#000000"},"insert":"激光探针台服务内容："},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"1、激光打标；"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"2、表层修复线路（利用激光将两层金属线熔融连接）；"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"3、驱除短路点；"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"4、激光断线；"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"5、干扰芯片测试；"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"除了以上几项之外激光探针台兼备常规探针台功能："},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"1.微小连接点信号引出 "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"2.失效分析失效确认"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"3.FIB电路修改后电学特性确认"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"4.晶圆可靠性验证"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"align":"center"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"一：手动探针台用途："},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"探针台主要应用于半导体行业、光电行业、集成电路以及封装的测试。 广泛应用于复杂、高速器件的精密电气测量的研发，旨在确保质量及可靠性，并缩减研发时间和器件制造工艺的成本。手动探针台的主要用途是为半导体芯片的电参数测试提供一个测试平台，探针台可吸附多种规格芯片，并提供多个可调测试针以及探针座，配合测量仪器可完成集成电路的电压、电流、电阻以及电容电压特性曲线等参数检测。适用于对芯片进行科研分析，抽查测试等用途。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"手动探针台应用领域："},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Failure analysis 集成电路失效分析                  "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Wafer level reliability晶元可靠性认证"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Device characterization 元器件特性量测              "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Process modeling塑性过程测试(材料特性分析)"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"IC Process monitoring 制成监控                    "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Package part probing IC封装阶段打线品质测试"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Flat panel probing 液晶面板的特性测试               "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"PC board probing PC主板的电性测试"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"ESD&TDR testing   ESD和TDR测试                     "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Microwave probing 微波量测(高频)"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Solar太阳能领域检测分析                             "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"LED、OLED、LCD领域检测分析"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"color":"#000000"},"insert":"二：手动探针台的使用方式："},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"1.将样品载入真空卡盘，开启真空阀门控制开关，使样品安全且牢固地吸附在卡盘上。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"2.使用卡盘X轴/Y轴控制旋钮移动卡盘平台，在显微镜低倍物镜聚焦下看清楚样品。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"3.使用卡盘X轴/Y轴控制旋钮移动卡盘平台将样品待测试点移动至显微镜下。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"4.显微镜切换为高倍率物镜，在大倍率下找到待测点，再微调显微镜聚焦和样品x-y，将影像调节清晰,带测点在显微镜视场中心。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"5.待测点位置确认好后,再调节探针座的位置,将探针装上后可眼观先将探针移到接近待测点的位置旁边,再使用探针座X-Y-Z三个微调旋钮,慢慢的将探针移至被测点,此时动作要小心且缓慢，以防动作过大误伤芯片，当探针针尖悬空于被测点上空时，可先用Y轴旋钮将探针退后少许，再使用Z轴旋钮进行下针，最后则使用X轴旋钮左右滑动，观察是否有少许划痕，证明是否已经接触。"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"6.确保针尖和被测点接触良好后，则可以通过连接的测试设备开始测试。常见故障的排除当您使用本仪器时，可能会碰到一些问题，下表列举了常见的故障及解决方法。手动探针台技术参数。"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"attributes":{"color":"#000000"},"insert":"三：手动探针台规格描述 （以实验室常见的仪准ADVANCED八寸，六寸探针台为例）： "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"探针台载物台平整度：5μm探针台右侧标配显微镜升降机构，可抬高显微镜，便于更换镜头和换待测物探针台左侧标配升降器,可快速升降台面8mm，并具备锁定功能探针台右下方标配精调旋转轮，可微调控制台面升降范围25mm（客户有特殊需求，可以增大范围），精度1μm6英寸或者8英寸载物盘可选，卡盘平整度：5μm，采用真空吸附方式，中心孔径250μm-1mm定制卡盘可0-360度旋转，旋转角度可微调，微调精度为0.1度，标配角度锁定旋钮大螺母可控制载物盘X-Y方向的移动，移动范围为150mm or 200mm，移动精度为1μm载物台具备快速导入导出功能，便于上下料载物台up/down功能（选项）可搭配金相高倍显微镜和体式显微镜，显微镜X-Y-Z移动范围2.5英寸，移动精度1um可搭配4~8颗探针座，进行DC或者高频测试可选附件射频测试探头及电缆                                   "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"有源探头"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"低电流/电容测试"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"高压模块"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"激光修复"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"高清数字相机"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"探针卡/封装/PCB板夹具"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"Hot 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4200各品牌的网络分析仪                               "},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"#000000"},"insert":"机台总述重量：50kg（含显微镜）尺寸：720mm宽*680mm长*80mm高（含显微镜）动力需求：电源220V/15A；4~6KG压缩空气"},{"attributes":{"align":"justify"},"insert":"\n"},{"attributes":{"color":"var(--weui-FG-0)"},"insert":"半导体工程师"},{"attributes":{"align":"justify"},"insert":"\n"},{"insert":"半导体经验分享，半导体成果交流，半导体信息发布。半导体行业动态，半导体从业者职业规划，芯片工程师成长历程。"},{"attributes":{"align":"justify"},"insert":"\n\n"},{"insert":"\n"}]